SmartSellTM - The New Way to Sell Online

We won't be beaten by anyone. Guaranteed

Environmental, Safety, and Health Issues in IC Production
By

Rating
Product Details

Table of Contents

Preface; Materials Research Society symposium proceedings; Part I. Chemical and Di Water Consumption: 1. In situ monitoring of HF reprocessing in an industrial scale A. J. Reddy, G. J. Norga, A. S. Park, A. L. Smith, J. Michel, L. C. Kimerling, B. Parekh, J.-H. Shyu and E. Deane; 2. Anhydrous HF processing as an alternative to HF/water processes J. Staffa, P. Roman, K. Chang, K. Torek and J. Ruzyllo; 3. Minimization of DI water consumption in wet clean rinse tanks J. Cook; 4. The implementation of dilute chemistries in semiconductor manufacturing Ron Sanders, Fuyu Lin and Pat Schay; Part II. Hazardous Gases: 5. PFC emission control options for plasma processing tools: a current assessment M. T. Mocella; 6. Perhalogenated organic byproducts from plasma etching processes and their effects on human health and environmental impact S. Bauer and I. Wolff; 7. Environmental issues of perfluorocompounds in the semiconductor industry Jeffrey D. Williams; 8. Effectiveness of an inwardly fired burner on abatement of PFCs A. M. Pierce and J. Van Gompel; 9. Gas stream analysis and PFC recovery in a semiconductor process J. A. B. Van Hoeymissen, M. Daniels, N. Anderson, W. Fyen and M. Heyns; 10. An integrated approach for the safe handling of hydrides J. R. Shealy, B. Butterfield, D. T. Emerson, K. L. Whittingham, B. L. Pitts and R. R. Bland; 11. Plasma etching of silicon dioxide and silicon nitride with nonperfluorocompound chemistries: trifluoroacetic anhydride and Iodofluorocarbons Simon M. Karecki, Laura C. Pruette and L. Rafael Reif; Part III. Equipment and Process Optimization for ESH: 12. Next generation processes and equipment that lead to positive environment, safety, and health impacts Phyllis Pei and H. Ray Kerby; 13. Parallel downflow rinse: water saving technology in water rinse Y. Hiratsuka and N. Fujikawa; 14. A technique for measuring slurry-flow dynamics during chemical mechanical polishing J. Coppeta, C. Rogers, A. Philipossian and F. Kaufman; 15. A plasma reactor for solid waste treatment on PECVD production systems S. Raoux, M. A. Fodor, W. N. Taylor, D. Cheung and K. Fairbairn; 16. Measurement of arsenic emission from doped Czochraiski silicon crystal growing operation D. Sinha, C. Carlson, Andy Homyak and Elias Hunter; Part IV. Novel Materials for ESH: 17. Chlorine precursors for grate oxidation processes M. J. McGeary, P. W. Mertens, B. Vermeire, M. Heyns, H. Sprey, A. Lubbers and M. Schaekers; 18. Photoresist polymer mask formed from aqueous phase via polymerization in a two-dimensional surfactant template P. D. Newman, G. K. Newman and J. H. Harwell; 19. An integrated chemical-microbiological approach for the disposal of waste thin-film cadmium telluride photovoltaic modules K. M. Paknikar, J. M. Rajwade, A. V. Pethkar, D. J. Goyal, P. G. Bilurkar and N. V. Mate; 20. Point-of-use silicon sources for CVD D. A. Saulys, S. A. Safvi, N. Pauly, J. A. Dopke, B. R. Preston, D. F. Gaines and T. F. Kuech; 21. Safe precursor gas for broad replacement of SiH4 in plasma processes employed in integrated circuit production M. J. Loboda, J. A. Seifferly, C. M. Grove and R. F. Schneider; Author index; Subject index.

Ask a Question About this Product More...
Write your question below:
Look for similar items by category
People also searched for
How Fishpond Works
Fishpond works with suppliers all over the world to bring you a huge selection of products, really great prices, and delivery included on over 25 million products that we sell. We do our best every day to make Fishpond an awesome place for customers to shop and get what they want — all at the best prices online.
Webmasters, Bloggers & Website Owners
You can earn a 5% commission by selling Environmental, Safety, and Health Issues in IC Production: Volume 447: Symposium Held December 4-5, 1996, Boston, Massachusetts, U.S.A. (MRS Proceedings) on your website. It's easy to get started - we will give you example code. After you're set-up, your website can earn you money while you work, play or even sleep! You should start right now!
Authors / Publishers
Are you the Author or Publisher of a book? Or the manufacturer of one of the millions of products that we sell. You can improve sales and grow your revenue by submitting additional information on this title. The better the information we have about a product, the more we will sell!
Item ships from and is sold by Fishpond World Ltd.
Back to top