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Introduction to Focused Ion Beam Nanometrology
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Table of Contents

  • 1. Metrology
  • 2. Focused Ion Beam
  • 3. Ion-Solid Interactions
  • 4. Focused Ion Beam - Materials Science Applications
  • 5. Focused Ion Beam Fabrication for Metrology
  • 6. Future Developments

About the Author

David C Cox received his PhD from the department of Metallurgy and Materials Science University of Cambridge, UK in 2001. He is currently a senior research fellow at the Advanced Technology Institute, University of Surrey, UK and has been seconded to the National Physical Laboratory, UK as a senior research scientist since 2005. Having a broad background in industry and academia covering many aspects of materials science, physics and electronic engineering, he has published close to 100 articles at the time of writing. Largely associated with both the Quantum Metrology and Materials groups at NPL, his most recent research work has concentrated on the area of using focused ion beam to fabricate devices for quantum metrology. Additionally, he has developed a strong interest in wider aspects of FIB fabrication and fundamental understanding of how focused ion beam can be used to study materials and the errors associated with aspects of the technique.

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