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An Introduction to Microelectromechanical Systems Engineering
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Table of Contents

MEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. MEM Structure and Systems in Industrial and Automotive Applications. Optical MEM Structures and Systems. MEM Structures and Systems for Medical Applications. MEM Structures and Systems for Electronic Applications.

About the Author

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.

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