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Processing of Wide Band Gap Semiconductors


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Provides readers with a broad overview of this rapidly expanding technology, bringing up to speed on new discoveries and commercial applications.

Table of Contents

Doping Limits and Bandgap Engineering in Wide Gap IIVI Compounds Epitaxial Growth of II-VI Compounds by MOVPE Ohmic Contacts to II-VI and III-V Compound Semiconductors Dry Etching of SiC Processing of Silicon Carbide for Devices and Circuits Plasma Etching of III-V Nitrides Ion Implantation in Wide Bandgap Semiconductors Rare Earth Impurities in Wide Gap Semiconductors SIMS Analysis of Wide Bandgap Semiconductors Hydrogen in Wide Bandgap Semiconductors Diamond Deposition and Characterization Index

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