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Semiconductor Industrial Hygiene Handbook


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A comprehensive review of the primary industrial hygiene topics relevant to semicondcutor processing from three of the premier industrial hygienists in the world.

Table of Contents

Introduction Industrial Hygiene Monitoring Industrial Hygiene Monitoring: Physical Agents Ventilation Personal Protective Equipment (PPE) Indoor Air Quality (IAQ) Ergonomics Industrial Hygiene Recordkeeping Plan Review Appendix A: Silicon Ingot and Wafer Manufacturing Appendix B: Silicon Device Manufacturing Introduction Appendix C: III-V (GaAs) Appendix D: III-V Device: Microwave IC Appendix E: Ion Implanter Maintenance Safety Considerations Appendix F: Bibliography Glossary and Acronyms Index


."..a practical guide..." -CIS Bull." ...'a must'...impressive..." - SSA Jnl." ...recommended this book as an excellent resource ..."-AIHA Jnl.

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