Table of Contents

1. What makes sensor devices and microsystems 'intelligent' or 'smart'? 2. Interfacing sensors to microcontrollers: a direct approach3. Temperature Sensors4. Capacitive sensors for displacement measurement in the sub-nanometer range 5. Integrated inductive displacement sensors for harsh industrial environments6. Magnetic Sensors7. Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range 8. Integrated polarization analyzing CMOS image sensors for detection and signal processing9. Advanced interfaces for resistive sensors10. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications11. Advanced optical incremental sensors: encoders and interferometers12. Microfabrication technologies used for creating smart devices for industrial applications13. Microactuators: design and technology14. Microreaction Chambers15. Dynamic behavior of smart MEMS in industrial applications16. MEMS integrating motion and displacement sensors 17. MEMS print heads for industrial printing 18. Photovoltaic and fuel cells in power MEMS for smart energy management19. Radio frequency (RF)-MEMS for smart communication microsystems20. Smart acoustic sensor array (SASA) system for real-time sound processing applications

About the Author

Stoyan Nihtianov (M’93-SM’98) received his M.Sc. and Ph.D. degrees in electronics from the Technical University in Sofia, Bulgaria in 1980 and 1987. From 1987 till 1995 he was part of the Dept. of Electronics, Technical University - Sofia, where he was an associate professor involved in research and teaching on analogue circuits and smart sensor systems.

Dr. Nihtianov is a member of the technical program committees of: International Conference on Industrial Technology (ICIT), International Symposium on Industrial Electronics (ISIE), International conference “Electronics” (Bulgaria). He is an AdCom member and serves as a chair of the technical committee on MEMS@Nanotechnology of the Industrial Electronics society. He is also an associate editor of the IEEE Sensors Journal, and serves as an officer “Industrial relations and conferences” of the BeNeLux section of IEEE. Antonio Luque received the M.Sc. and Ph.D. degrees in electrical engineering from the University of Seville, Seville, Spain, in 2000 and 2005, respectively. He currently holds the position of Associate Professor in the Department of Electronics Engineering, University of Seville.

His research interests include micro?uidics, inertial sensors, BioMEMS, and polymer microsystems. Dr. Luque was the Chairman of the IEEE Industrial Electronics Society Technical Committee on MEMS and Nanotechnology in 2008–2009, and member of the IEEE JMEMS Steering Committee during 2013. He was a recipient of the Burgen Scholarship from the Academia Europaea in 2007.