Overview. Semiconductor silicon. Group III-V compounds. Group II-VI semiconductors. Chemical vapour deposition. Plasma-enhanced chemical vapour deposition. Metal-organic vapour phase epitaxy. Liquid-phase epitaxy of III-V compounds. Photoresists. X-ray and E-beam resists. Wet etching. Polyimides. Molecular electronics. Computer modelling. Plasma etching. Polymers in plasmas.

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'The style and excellent choice of topics and material covered makes this book an ideal starting point for postgraduates and researchers concerned with semiconductor integrated circuit manufacture.' Chemistry in Britain

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