Table of Contents

Introduction.Some Relevant Physical Concepts.Vacuum Measurement.Identification of Gases Present.Oil-Sealed Mechanical Rotary Pumps.Oil-Free Mechanical Primary Pumps.Diffusion Pumps and Accessories, Integrated Vapour Pumping.Groups and Vapour Boosters.Turbomolecular Pumps.Cryopumps.Sorption and Getter Pumps.Vacuum Pump Comparisons.Vacuum Systems Connections, Components and Assembly.Considerations in Systems Design.Vacuum Leak Detection.Guide to the Safe Use of Vacuum Equipment.