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Ic Fabrication Technology
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1. Overview of Metal-Oxide-Semiconductor (MOS) Transistor 2. Silicon Wafer Preparation for MOS Transistor Fabrication 3. MOS Transistor Process Flow 4. Oxidation 5. Mask 6. Lithography 7. Etching 8. Diffusion 9. Ion-Implantation 10. Thin Film Deposition 11. ULSI (nano) Fabrication

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