(NOTE: Chapters 3-11 include an Introduction, Historical
Development and Basic Concepts, Manufacturing Methods and
Equipment, Measurement Methods, Models and Simulation, Limits and
Future Trends in Technologies and Models, Summary of Key Ideas,
References, and Problems.)
1. Introduction and Historical Perspective.
Introduction. Integrated Circuits and the Planar Process—Key
Inventions That Made It All Possible. Semiconductors. Semiconductor
Devices. Semiconductor Circuit Families. Modern Scientific
Discovery—Experiments, Theory and Computer Simulation. The Plan for
This Book.
2. Modern CMOS Technology.
CMOS Process Flow.
3. Crystal Growth, Wafer Fabrication and Basic Properties of
Silicon Wafers.
4. Semiconductor Manufacturing— Clean Rooms, Wafer Cleaning and
Gettering.
5. Lithography.
6. Thermal Oxidation and the Si/SiO2 Interface.
7. Dopant Diffusion.
8. Ion Implantation.
9. Thin Film Deposition.
10. Etching.
11. Backend Technology.
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