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Handbook of Optical Metrology
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Table of Contents

Fundamentals of Optical Elements and Devices
Light Sources
Natalia Dushkina
Lenses, Prisms, and Mirrors
Peter R. Hall
Optoelectronic Sensors
Motohiro Suyama
Optical Devices and Optomechanical Elements
Akihiko Chaki and Kenji Magara
Fundamentals of Principles and Techniques for Metrology
Propagation of Light
Natalia Dushkina
Interferometry
David A. Page
Holography
Giancarlo Pedrini
Speckle Methods and Applications
Nandigana Krishna Mohan
Moire Metrology
Lianhua Jin
Optical Heterodyne Measurement Method
Masao Hirano
Diffraction
Toru Yoshizawa
Light Scattering
Lev T. Perelman
Polarization
Michael Shribak
Near-Field Optics
Wenhao Huang, Xi Li, and Guoyong Zhang
Length and Size
René Schödel
Practical Applications
Displacement
Akiko Hirai, Mariko Kajima, and Souichi Telada
Straightness and Alignment
Ruedi Thalmann
Flatness
Toshiyuki Takatsuji and Youichi Bitou
Surface Profi lometry
Toru Yoshizawa and Toshitaka Wakayama
Three-Dimensional Shape Measurement
Frank Chen, Gordon M. Brown, and Mumin Song
Fringe Analysis
Jun-ichi Kato
Photogrammetry
Nobuo Kochi
Optical Methods in Solid Mechanics
Anand Asundi
Optical Methods in Flow Measurement
Sang Joon Lee
Polarimetry
Baoliang Wang
Birefringence Measurement
Yukitoshi Otani
Ellipsometry
Hiroyuki Fujiwara
Optical Thin Film and Coatings
Cheng-Chung Lee and Shigetaro Ogura
Film Surface and Thickness Profi lometry
Katsuichi Kitagawa
On-Machine Measurements
Takashi Nomura and Kazuhide Kamiya

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Mitutoyo Corporation, Kanagawa, Japan

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